The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Dec. 04, 2007
Robin A. Gardiner, Strasslach, DE;
Thomas H. Baum, New Fairfield, CT (US);
Douglas Cameron Gordon, Durango, CO (US);
Connie L. Gordon, Legal Representative, Durango, CO (US);
Timothy E. Glassman, Portland, OR (US);
Sofia Pombrik, Bethel, CT (US);
Brian A. Vaartstra, Nampa, ID (US);
Peter S. Kirlin, Austin, TX (US);
Robin A. Gardiner, Strasslach, DE;
Thomas H. Baum, New Fairfield, CT (US);
Douglas Cameron Gordon, Durango, CO (US);
Connie L. Gordon, legal representative, Durango, CO (US);
Timothy E. Glassman, Portland, OR (US);
Sofia Pombrik, Bethel, CT (US);
Brian A. Vaartstra, Nampa, ID (US);
Peter S. Kirlin, Austin, TX (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
A β-diketonate alkoxide metal compound and a source reagent composition are provided. The β-diketonate alkoxide metal compound may include a metal M selected from Mg, Ca, Sr, Ba, Sc, Y, La, Ce, Ti, Zr, Hf, Pr, V, Nb, Ta, Nd, Cr, W, Pm, Mn, Re, Sm, Fe, Ru, Eu, Co, Rh, Ir, Gd, Ni, Tb, Cu, Dy, Ho, Al, Tl, Er, Sn, Pb, Tm, Bi, Lu, Th, Pd, Pt, Ga, In, Au, Ag, Li, Na, K, Rb, Cs, Mo, and Yb. The metal may be complexed to at least one alkoxide ligand and one β-diketonate ligand.