The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
May. 17, 2010
Takehiro Seshimo, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Takeyoshi Mimura, Kawasaki, JP;
Daichi Takaki, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Takeyoshi Mimura, Kawasaki, JP;
Daichi Takaki, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A positive resist composition including a base component (A') which exhibits increased solubility in an alkali developing solution under action of acid and generates acid upon exposure, the base component (A′) including a polymeric compound (A1′) having a structural unit (a5-1) represented by general formula (a5-1), a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) that generates acid upon exposure, the structural unit (a0-2) containing a group represented by general formula (a0-2′) (wherein Xrepresents an anion moiety represented by one of general formulas (1) to (5)).