The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Mar. 16, 2010
Toyoaki Nakajima, Chigasaki, JP;
Takeshi Miyashita, Chigasaki, JP;
Yasushi Nagata, Chigasaki, JP;
Yasufumi Uchida, Chigasaki, JP;
Hideki Yoshizawa, Chigasaki, JP;
Toyoaki Nakajima, Chigasaki, JP;
Takeshi Miyashita, Chigasaki, JP;
Yasushi Nagata, Chigasaki, JP;
Yasufumi Uchida, Chigasaki, JP;
Hideki Yoshizawa, Chigasaki, JP;
Ulvac, Inc., Chigasaki-Shi, JP;
Abstract
An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.