The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
Mar. 31, 2009
Ehud Aharoni, Kfar Saba, IL;
Robert J. Baseman, Brewster, NY (US);
Ramona Kei, Hopewell Junction, NY (US);
Oded Margalit, Ramat Gan, IL;
Kevin Mackey, Wappingers Falls, NY (US);
Michal Rosen-zvi, Jerusalem, IL;
Raminderpal Singh, Cortlandt Manor, NY (US);
Noam Slonim, Jerusalem, IL;
Hong Lin, Yorktown Heights, NY (US);
Fateh A. Tipu, Wappingers Falls, NY (US);
Adam D. Ticknor, Poughkeepsie, NY (US);
Timothy M. Mccormack, Pleasant Valley, NY (US);
Ehud Aharoni, Kfar Saba, IL;
Robert J. Baseman, Brewster, NY (US);
Ramona Kei, Hopewell Junction, NY (US);
Oded Margalit, Ramat Gan, IL;
Kevin Mackey, Wappingers Falls, NY (US);
Michal Rosen-Zvi, Jerusalem, IL;
Raminderpal Singh, Cortlandt Manor, NY (US);
Noam Slonim, Jerusalem, IL;
Hong Lin, Yorktown Heights, NY (US);
Fateh A. Tipu, Wappingers Falls, NY (US);
Adam D. Ticknor, Poughkeepsie, NY (US);
Timothy M. McCormack, Pleasant Valley, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.