The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2012

Filed:

Oct. 09, 2009
Applicants:

Hong YE, San Diego, CA (US);

Alex Ershov, Escondido, CA (US);

Rajasekhar Rao, San Diego, CA (US);

Daniel Brown, San Diego, CA (US);

Slava Rokitski, La Jolla, CA (US);

Rong (Lauren) Liu, San Diego, CA (US);

Ray Cybulski, San Diego, CA (US);

James J. Ferrell, Temecula, CA (US);

Robert Bergstedt, Carlsbad, CA (US);

John Viatella, San Diego, CA (US);

Thomas Duffey, San Diego, CA (US);

Inventors:

Hong Ye, San Diego, CA (US);

Alex Ershov, Escondido, CA (US);

Rajasekhar Rao, San Diego, CA (US);

Daniel Brown, San Diego, CA (US);

Slava Rokitski, La Jolla, CA (US);

Rong (Lauren) Liu, San Diego, CA (US);

Ray Cybulski, San Diego, CA (US);

James J. Ferrell, Temecula, CA (US);

Robert Bergstedt, Carlsbad, CA (US);

John Viatella, San Diego, CA (US);

Thomas Duffey, San Diego, CA (US);

Assignee:

Cymer, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/08 (2006.01); G02B 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.


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