The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 02, 2012

Filed:

Jun. 09, 2010
Applicants:

Yong Yu Liu, Hsinchu, TW;

Choon Leong Lou, Hsinchu, TW;

Lai Peng Chew, Hsinchu, TW;

Inventors:

Yong Yu Liu, Hsinchu, TW;

Choon Leong Lou, Hsinchu, TW;

Lai Peng Chew, Hsinchu, TW;

Assignee:

Star Technologies Inc., Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

One aspect of the present disclosure provides a probing apparatus with on-probe device-mapping function. A probing apparatus according to this aspect of the present disclosure comprises a housing, at least one probe stage positioned on the housing and configured to retain at least one probe, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, and an inspection module having a predetermined field of view configured to capture an image showing at least the semiconductor device, wherein the probe stage includes a driving unit configured to move the probe out of focus of the inspection module in a mapping phase while keeping the device under test in the field of view of the optical inspection module.


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Liu, Yong. (2012). Probing apparatus with on-probe device-mapping function (U.S. Patent No. 8279451). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8279451

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