The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Nov. 15, 2007
Stojan Kanev, Thiendorf OT Sacka, DE;
Hans-jurgen Fleischer, Priestewitz, DE;
Stefan Kreissig, Venusberg, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stöpchen, DE;
Andreas Kittlaus, Bad Liebenwerda OT Theisa, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Hans-Jurgen Fleischer, Priestewitz, DE;
Stefan Kreissig, Venusberg, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stöpchen, DE;
Andreas Kittlaus, Bad Liebenwerda OT Theisa, DE;
Cascade Microtech, Inc., Beaverton, OR (US);
Abstract
A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.