The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Jun. 03, 2008
Applicants:
Sebastian Dünnebeil, Berlin, DE;
Heinz Klingl, Neusäss, DE;
Inventors:
Sebastian Dünnebeil, Berlin, DE;
Heinz Klingl, Neusäss, DE;
Assignee:
Atotech Deutschland GmbH, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/288 (2006.01); C23C 18/31 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
To ensure a uniform flow over the surface of a product W, an apparatus is provided for the wet chemical treatment of the product W that is disposed in the apparatus. This apparatus comprises at least one flow memberthat includes respectively at least one paddle-like flow element, wherein at least one flow memberis disposed situated opposite the surface of the product W and is moveable substantially parallel to the surface of the product W.