The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Mar. 13, 2009
Diwaskar Adhikari, Austin, TX (US);
Raymond G. Goss, Austin, TX (US);
Carmen A. Maxim, Austin, TX (US);
Jan Rothe, Dresden, DE;
Diwaskar Adhikari, Austin, TX (US);
Raymond G. Goss, Austin, TX (US);
Carmen A. Maxim, Austin, TX (US);
Jan Rothe, Dresden, DE;
Globalfoundries Inc., Grand Cayman, KY;
Abstract
A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.