The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 25, 2012

Filed:

Apr. 09, 2010
Applicants:

Ming-huei Shen, Dounan Town, TW;

Tsun-kai Tsao, Yongkang, TW;

Shih-chang Liu, Hsin-Chu, TW;

Chi-hsin Lo, Zhubei, TW;

Chia-shiung Tsai, Hsin-Chu, TW;

Inventors:

Ming-Huei Shen, Dounan Town, TW;

Tsun-Kai Tsao, Yongkang, TW;

Shih-Chang Liu, Hsin-Chu, TW;

Chi-Hsin Lo, Zhubei, TW;

Chia-Shiung Tsai, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor structure is provided. The semiconductor structure includes a first floating gate on the semiconductor substrate, the floating gate having a concave side surface; a first control gate on the first floating gate; a first spacer adjacent to the first control gate; a first word line adjacent a first side of the first floating gate with a first distance; and an erase gate adjacent a second side of the first floating gate with a second distance less than the first distance, the second side being opposite the first side.


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