The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Dec. 28, 2006
Shangting Detweiler, Dallas, TX (US);
Basab Chatterjee, Allen, TX (US);
Chris D. Atkinson, Lewisville, TX (US);
Richard L. Guldi, Dallas, TX (US);
Shangting Detweiler, Dallas, TX (US);
Basab Chatterjee, Allen, TX (US);
Chris D. Atkinson, Lewisville, TX (US);
Richard L. Guldi, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
In accordance with the invention, there are semiconductor devices and methods of making semiconductor devices and holes. The method of making a semiconductor device can comprise forming a photoresist layer over a surface of a wafer, wherein the wafer comprises an edge that has a substantially rounded profile, an array of dies, and at least one edge die. The method can also comprise dividing a shot area into a plurality of shot portions and assigning a blind ID to each of the plurality of shot portions. The method can further comprise identifying one or more edge shot portions on the edge of the wafer for additional exposure; and exposing one or more times identified one or more edge shot portions on the edge of the wafer and blocking non-identified one or more non-edge shot portions.