The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Oct. 12, 2006
Applicants:
Hugh Cunning, Chester, GB;
Graham Williams, South Wirral, GB;
Rajesh Odedra, Altrincham, GB;
Ravi Kanjolia, North Andover, MA (US);
Inventors:
Hugh Cunning, Chester, GB;
Graham Williams, South Wirral, GB;
Rajesh Odedra, Altrincham, GB;
Ravi Kanjolia, North Andover, MA (US);
Assignee:
Sigma-Aldrich Co. LLC, St. Louis, MO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A bubbler () for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member () positioned between its inlet () and outlet () that is provided with a plurality of apertures therein. The member () is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.