The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
May. 01, 2008
Lawrence Hendler, Cupertino, CA (US);
Stela Diamant Lazarovich, Herzlia Pituach, IL;
Ron Hadar, Cupertino, CA (US);
Nouna Kettaneh, Hollis, NH (US);
Uzi Levami, Hod Hasharon, IL;
Dmitry Perlroizen, Rehovot, IL;
Lawrence Hendler, Cupertino, CA (US);
Stela Diamant Lazarovich, Herzlia Pituach, IL;
Ron Hadar, Cupertino, CA (US);
Nouna Kettaneh, Hollis, NH (US);
Uzi Levami, Hod Hasharon, IL;
Dmitry Perlroizen, Rehovot, IL;
MKS Instruments, Inc., Andover, MA (US);
Abstract
A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.