The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Aug. 07, 2009
Dexter Tan, Singapore, SG;
Chee Chong Lim, Singapore, SG;
Sai Hooi Yeong, Singapore, SG;
Chee Mang NG, Singapore, SG;
Dexter Tan, Singapore, SG;
Chee Chong Lim, Singapore, SG;
Sai Hooi Yeong, Singapore, SG;
Chee Mang Ng, Singapore, SG;
Nanyang Technological University, Singapore, SG;
National University of Singapore, Singapore, SG;
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Abstract
A method of forming a device is presented. The method includes providing a wafer having an active surface and dividing the wafer into a plurality of portions. The wafer is selectively processed by localized heating of a first of the plurality of portions. The wafer is then repeatedly selectively processed by localized heating of a next of the plurality of portions until all plurality of portions have been selectively processed.