The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Aug. 11, 2011
Zukhra I. Niazimbetova, Westboro, MA (US);
Elie H. Najjar, Norwood, MA (US);
Maria Anna Rzeznik, Shrewsbury, MA (US);
Erik Reddington, Ashland, MA (US);
Zukhra I. Niazimbetova, Westboro, MA (US);
Elie H. Najjar, Norwood, MA (US);
Maria Anna Rzeznik, Shrewsbury, MA (US);
Erik Reddington, Ashland, MA (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.