The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Apr. 10, 2009
Gerhard Schubert, Jena, DE;
Christian Jackel, Jena, DE;
Ulf-carsten Kirschstein, Jena, DE;
Michael Boehm, Jena, DE;
René Bauer, Jena, DE;
Gerd Harnisch, Jena, DE;
Thomas Peschel, Jena, DE;
Stefan Risse, Jena, DE;
Christoph Schenk, Jena, DE;
Gerhard Schubert, Jena, DE;
Christian Jackel, Jena, DE;
Ulf-Carsten Kirschstein, Jena, DE;
Michael Boehm, Jena, DE;
René Bauer, Jena, DE;
Gerd Harnisch, Jena, DE;
Thomas Peschel, Jena, DE;
Stefan Risse, Jena, DE;
Christoph Schenk, Jena, DE;
Vistec Electron Beam GmbH, Jena, DE;
Abstract
A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.