The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Jan. 28, 2009
Thoralf Kautzsch, Dresden, DE;
Bernhard Winkler, Regensburg, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Bernd Foeste, Dresden, DE;
Andreas Thamm, Dresden, DE;
Boris Binder, Dresden, DE;
Thoralf Kautzsch, Dresden, DE;
Bernhard Winkler, Regensburg, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Bernd Foeste, Dresden, DE;
Andreas Thamm, Dresden, DE;
Boris Binder, Dresden, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element and a complementary metal-oxide-semiconductor (CMOS) circuit formed on the substrate.