The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jun. 18, 2007
Hideto Yamaguchi, Imizu, JP;
Yasuhiro Joho, Nanto, JP;
Mitsuhiro Matsuda, Takaoka, JP;
Yoshitaka Koyama, Oyabe, JP;
Hideto Yamaguchi, Imizu, JP;
Yasuhiro Joho, Nanto, JP;
Mitsuhiro Matsuda, Takaoka, JP;
Yoshitaka Koyama, Oyabe, JP;
Hitachi Kokusai Electric, Inc., Tokyo, JP;
Abstract
There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatusunder operation are shared and collected online by a main controller, a data collection auxiliary computerand a data collecting computerthrough a network, and the operation state is collectively inspected by an inspecting computer