The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jul. 08, 2009
Yij Chieh Chu, Sanchong, TW;
Chun Chi Chen, Taipei, TW;
Yun-zong Tian, Shihgang township, Taichung County, TW;
Shih Chang Kao, Kaohsiung, TW;
Cheng-hao Chen, Taipei, TW;
Yij Chieh Chu, Sanchong, TW;
Chun Chi Chen, Taipei, TW;
Yun-Zong Tian, Shihgang township, Taichung County, TW;
Shih Chang Kao, Kaohsiung, TW;
Cheng-Hao Chen, Taipei, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A method for assessing data worth for analyzing yield rate includes: getting measured data with data points that corresponds to control variables of semiconductor manufacturing; transforming the data points into a distance matrix with matrix distances corresponding to differences of the data points under the control variables; expressing sample differences recorded in the distance matrix by two-dimension vectors and calculating similarity degrees of the two-dimension vectors and the distance matrix so as to take loss information as a conversion error value; calculating discriminant ability of the transformed two-dimension data and expressing the discriminant ability by an error rate of discriminant; and taking the conversion error value and the error rate of discriminant as penalty terms and calculating a quality score corresponding to the measured data. Thereby, before analyzing the yield rate of semiconductor manufacturing, analysts can determine whether data includes information affecting the yield rate based on the quality score.