The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jun. 01, 2010
Zhi-wen Sun, San Jose, CA (US);
Nitin Kumar, Fremont, CA (US);
Guizhen Zhang, Santa Clara, CA (US);
Nikhil Kalyankar, San Jose, CA (US);
Minh Anh Nguyen, San Jose, CA (US);
Zhi-Wen Sun, San Jose, CA (US);
Nitin Kumar, Fremont, CA (US);
Guizhen Zhang, Santa Clara, CA (US);
Nikhil Kalyankar, San Jose, CA (US);
Minh Anh Nguyen, San Jose, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
Embodiments of the current invention include methods of improving a process of forming a textured TCO film by combinatorial methods. The combinatorial method may include depositing a TCO by physical vapor deposition or sputtering, annealing the TCO, and etching the TCO where at least one of the depositing, the annealing, or the etching is performed combinatorially. Embodiments of the current invention also include improved methods of forming the TCO based on the results of combinatorial testing.