The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Apr. 21, 2005
Applicants:
Mark H. Somervell, Richardson, TX (US);
Benjamen M. Rathsack, Richardson, TX (US);
David C. Hall, Murphy, TX (US);
Inventors:
Mark H. Somervell, Richardson, TX (US);
Benjamen M. Rathsack, Richardson, TX (US);
David C. Hall, Murphy, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); B01F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a blended solvent for solubilizing an ultraviolet photoresist. The blended solvent comprises a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein the first solvent comprises a cyclic ester. A balance of the mixture comprises a second solvent, wherein the second solvent comprises a volatile organic liquid.