The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Nov. 08, 2010
Joseph Terence Smith, Columbia, MD (US);
Dennis A. Adams, Gambrills, MD (US);
Patrick Bruckner Shea, Washington, DC (US);
Joseph Terence Smith, Columbia, MD (US);
Dennis A. Adams, Gambrills, MD (US);
Patrick Bruckner Shea, Washington, DC (US);
Northrop Grumman Systems Corporation, Falls Church, VA (US);
Abstract
An embodiment of a method is disclosed to integrate silicon oxide nitride oxide silicon (SONOS) non-volatile memory (NVM) into a conventional complementary metal oxide semiconductor (CMOS) semiconductor foundry process flow. An embodiment of the method only adds a few additional steps to a standard CMOS foundry process flow and makes minor changes to the rest of the baseline CMOS foundry process flow to form a new process module that includes both CMOS devices and an embedded SONOS NVM.