The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Mar. 29, 2011
Herman M. J. R. Soemers, Mierlo, NL;
Franciskus Hendrikus Van Deuren, Valkenswaard, NL;
Hendrik Dirk Visser, Eindhoven, NL;
Sander C. Broers, Eindhoven, NL;
Herman M. J. R. Soemers, Mierlo, NL;
Franciskus Hendrikus van Deuren, Valkenswaard, NL;
Hendrik Dirk Visser, Eindhoven, NL;
Sander C. Broers, Eindhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.