The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Jan. 15, 2010
Jing Xue, Sunnyvale, CA (US);
Jensheng Huang, San Jose, CA (US);
Jing Xue, Sunnyvale, CA (US);
JenSheng Huang, San Jose, CA (US);
Synopsys, Inc., Mountain View, CA (US);
Abstract
One embodiment of the present invention relates to a system that constructs and calibrates an etch-aware photolithography model. During operation, the system constructs an etch bias model which models a critical dimension (CD) difference between a measured CD value of a feature after the photolithography process and a measured CD value of the feature after the etch process. The system then fits the photolithography process model based at least on the post-lithography measured CD data and the etch bias model, thereby causing the photolithography process model to be aware of etch effects. The present techniques facilitate bridging the gap between the photolithography and the etch process in the OPC modeling flow. In particular, these techniques can be used to modify conventional staged OPC model or to construct a model based rule table for correcting a retarget model.