The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Sep. 24, 2009
Ditza Auerbach, Aseret, IL;
Ditza Auerbach, Aseret, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Random defects and repeaters accommodated on a wafer are detected using slice information obtained by scanning a plurality of wafer slices; analyzing defect information using a first set of filters selected to detect random defects, thereby generating a first set of defects per slice, analyzing the defect information using a second set of filters selected to detect repeaters, thereby providing a second set of defects per slice; analyzing a plurality of the second sets of defects per slice using a third set of filters selected to detect repeater families, thereby providing a set of repeaters per wafer; and optionally combining the set of repeaters per wafer with a plurality of the first sets of defects per slice, thereby generating one or more defect maps indicative of random defects and/or repeaters.