The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Feb. 16, 2009
Applicants:
Akiya Kawaue, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Inventors:
Akiya Kawaue, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07D 493/08 (2006.01); C07D 495/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A resist composition including a base component (A) that exhibits changed solubility in an alkali developing solution under the action of acid, and an acid generator component (B) that generates acid upon exposure, wherein the acid generator component (B) includes an acid generator (B1) consisting of a compound represented by general formula (b1-2) shown below: