The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Jun. 08, 2005
William A. Moffat, San Jose, CA (US);
Boris C. Randazzo, Patterson, CA (US);
Craig W. Mccoy, San Jose, CA (US);
Stuart V. Allen, Gilroy, CA (US);
William A. Moffat, San Jose, CA (US);
Boris C. Randazzo, Patterson, CA (US);
Craig W. McCoy, San Jose, CA (US);
Stuart V. Allen, Gilroy, CA (US);
Yield Engineering Systems, Inc., Livermore, CA (US);
Abstract
A process for the coating of substrates comprising insertion of a substrate into a process oven, plasma cleaning of the substrate, dehydration of the substrate, withdrawal of a metered amount of one or more chemicals from one or more chemical reservoirs, vaporizing the withdrawn chemicals in one or more vapor chambers, and transfer of the vaporized chemicals into a process oven, thereby reacting with the substrate. An apparatus for the coating of substrates comprising a process oven, a gas plasma generator, a metered chemical withdrawal subsystem, and a vaporization subsystem.