The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Mar. 23, 2006
Masanobu Hatanaka, Susono, JP;
Yoshikazu Takahashi, Tsukuba, JP;
Michio Ishikawa, Susono, JP;
Fumio Nakamura, Susono, JP;
Masanobu Hatanaka, Susono, JP;
Yoshikazu Takahashi, Tsukuba, JP;
Michio Ishikawa, Susono, JP;
Fumio Nakamura, Susono, JP;
ULVAC, Inc., Kanagawa, JP;
Abstract
The object of this invention is to provide a method for producing a component for vacuum apparatus and a resin coating forming apparatus capable of easily forming a resin coating on an internal flow path complex in shape. The resin coating forming apparatus () comprises a monomer vapor supplying unit (), a vacuum pumping line () for transporting monomer vapor, a connection portion () connectable with the internal flow path of a component (A) provided on part of the vacuum pumping line (), and a temperature adjusting unit () for depositing the monomer vapor onto the internal flow path of the component (A) connected with the connection portion () to form a resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the component (A) by merely exposing the internal flow path to monomer vapor.