The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Jan. 29, 2007
Takashi Hozumi, Tokyo, JP;
Nobuhito Miyashita, Tokyo, JP;
Takanori Inada, Tokyo, JP;
Kozo Matake, Tokyo, JP;
Yoshinori Ojima, Tokyo, JP;
Susumu Miyake, Tokyo, JP;
Katsuaki Usui, Tokyo, JP;
Takashi Hozumi, Tokyo, JP;
Nobuhito Miyashita, Tokyo, JP;
Takanori Inada, Tokyo, JP;
Kozo Matake, Tokyo, JP;
Yoshinori Ojima, Tokyo, JP;
Susumu Miyake, Tokyo, JP;
Katsuaki Usui, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump () disposed at an outside-pressure side, and a booster pump () disposed at a vacuum side. The booster pump () and the main pump () are coupled in series. The booster pump () has a higher pumping speed than that of the main pump (). Each of the main pump () and the booster pump () includes a pair of pump rotors (and), a casing () having an inlet port and an outlet port, and a pair of magnet rotors (and) rotatable with the pair of pump rotors.