The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Aug. 03, 2010
Applicants:
Craig M. Herzinger, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Mathias M. Schubert, Lincoln, NE (US);
Tino Hofmann, Lincoln, NE (US);
Inventors:
Craig M. Herzinger, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Mathias M. Schubert, Lincoln, NE (US);
Tino Hofmann, Lincoln, NE (US);
Assignees:
J.A. Woollam Co., Inc., Lincoln, NE (US);
Board of Regents of Nebraska University, Lincoln, NE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
Herzinger, Craig. (2012). Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces (U.S. Patent No. 8248607). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8248607
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile