The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Jul. 24, 2009
Georgy K. Vinogradov, Sagamihara, JP;
Vladimir M. Menagarishvili, Sagamihara, JP;
Tetsuhiko Shimamura, Sagamihara, JP;
Masayuki Nakamura, Sagamihara, JP;
Georgy K. Vinogradov, Sagamihara, JP;
Vladimir M. Menagarishvili, Sagamihara, JP;
Tetsuhiko Shimamura, Sagamihara, JP;
Masayuki Nakamura, Sagamihara, JP;
Lam Research Corporation, Fremont, CA (US);
Abstract
The plasma generator of our invention comprises of the induction coil which is symmetric with respect to the reference plane between two terminal ends. Plasma processing gas is supplied to a predetermined space, and high frequency electricity is supplied to the induction coil, thereby the plasma generator generates plasma in the space. The reference plane passes between the two terminal ends and through longitude axis of the induction coil. The plasma generator can generate plasma with high quality of homogeneous.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile