The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Dec. 07, 2009
Bruce G. Elmegreen, Yorktown Heights, NY (US);
Lia Krusin-elbaum, Yorktown Heights, NY (US);
Glenn J. Martyna, Yorktown Heights, NY (US);
Xiao HU Liu, Yorktown Heights, NY (US);
Dennis M. Newns, Yorktown Heights, NY (US);
Kuan-neng Chen, Hsinchu, TW;
Bruce G. Elmegreen, Yorktown Heights, NY (US);
Lia Krusin-Elbaum, Yorktown Heights, NY (US);
Glenn J. Martyna, Yorktown Heights, NY (US);
Xiao Hu Liu, Yorktown Heights, NY (US);
Dennis M. Newns, Yorktown Heights, NY (US);
Kuan-Neng Chen, Hsinchu, TW;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A coupling structure for coupling piezoelectric material generated stresses to an actuated device of an integrated circuit includes a rigid stiffener structure formed around a piezoelectric (PE) material and the actuated device, the actuated device comprising a piezoresistive (PR) material that has an electrical resistance dependent upon an applied pressure thereto; and a soft buffer structure formed around the PE material and PR material, the buffer structure disposed between the PE and PR materials and the stiffener structure, wherein the stiffener structure clamps both the PE and PR materials to a substrate over which the PE and PR materials are formed, and wherein the soft buffer structure permits the PE material freedom to move relative to the PR material, thereby coupling stress generated by an applied voltage to the PE material to the PR material so as change the electrical resistance of the PR material.