The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2012

Filed:

Apr. 25, 2011
Applicants:

Dongmin Chen, Saratoga, CA (US);

William Spencer Worley, Half Moon Bay, CA (US);

Hung-nan Chen, Kaohsiung Hsien, TW;

Inventors:

Dongmin Chen, Saratoga, CA (US);

William Spencer Worley, Half Moon Bay, CA (US);

Hung-Nan Chen, Kaohsiung Hsien, TW;

Assignee:

Miradia, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 23/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region.


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