The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
May. 04, 2009
Applicants:
Michael White, Oswego, IL (US);
Lamon Jones, Aurora, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Inventors:
Michael White, Oswego, IL (US);
Lamon Jones, Aurora, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a method of chemically-mechanically polishing a substrate comprising at least one layer of single crystal silicon carbide. The method utilizes a chemical-mechanical polishing composition comprising a liquid carrier, an abrasive, a catalyst comprising a transition metal composition, and an oxidizing agent.
White, Michael. (2012). Polishing silicon carbide (U.S. Patent No. 8247328). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8247328
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile