The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Jul. 13, 2009
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component that exhibits changed solubility in an alkali developing solution under the action of acid, and an acid generator consisting of a compound represented by general formula (b1). In formula (b1), Yrepresents a fluorinated alkylene group of 1 to 4 carbon atoms, X represents an aliphatic cyclic group of 3 to 30 carbon atoms, R' to R′ each represents an aryl group or alkyl group, provided that at least one of R′ to R′ is an aryl group having a substituent represented by general formula (b1-0), and two alkyl groups among R′ to R′ may be bonded to each other to form a ring with the sulfur atom in the formula. In formula (b1-0), Rrepresents a chain-like or cyclic hydrocarbon group, and f and g each represents 0 or 1.