The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Mar. 14, 2008
Michael Teich, Moritzburg OT Friedewald, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Jörg Kiesewetter, Thiendorf OT Sacka, DE;
Michael Teich, Moritzburg OT Friedewald, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Jörg Kiesewetter, Thiendorf OT Sacka, DE;
Cascade Microtech, Inc., Beaverton, OH (US);
Abstract
A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.