The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Dec. 17, 2008
Applicants:
Ramachandramurthy Pradeep Yelehanka, Singapore, SG;
Shailendra Mishra, Singapore, SG;
Sripad Nagarad, Singapore, SG;
Inventors:
Ramachandramurthy Pradeep Yelehanka, Singapore, SG;
Shailendra Mishra, Singapore, SG;
Sripad Nagarad, Singapore, SG;
Assignee:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device that includes a substrate with an active region is disclosed. The device includes a gate disposed in the active region and tunable sidewall spacers on sidewalls of the gate. A profile of the tunable sidewall spacers includes upper and lower portions in which width of the spacers in the upper portion is reduced at a greater rate than the lower portion.