The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Apr. 28, 2006
Rajesh Baskaran, Kalispell, MT (US);
Robert W. Batz, Jr., Kalispell, MT (US);
Bioh Kim, Kalispell, MT (US);
Tom L. Ritzdorf, Bigfork, MT (US);
John L. Klocke, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Rajesh Baskaran, Kalispell, MT (US);
Robert W. Batz, Jr., Kalispell, MT (US);
Bioh Kim, Kalispell, MT (US);
Tom L. Ritzdorf, Bigfork, MT (US);
John L. Klocke, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.