The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2012

Filed:

Feb. 14, 2011
Applicants:

Katsuaki Nakano, Susono, JP;

Junichi Itoh, Susono, JP;

Daisuke Hiramatsu, Susono, JP;

Tadahisa Arahori, Ashiya, JP;

Ken Okamoto, Amagasaki, JP;

Inventors:

Katsuaki Nakano, Susono, JP;

Junichi Itoh, Susono, JP;

Daisuke Hiramatsu, Susono, JP;

Tadahisa Arahori, Ashiya, JP;

Ken Okamoto, Amagasaki, JP;

Assignees:

ULVAC, Inc., Kanagawa, JP;

Ferrotec Ceramics Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles.


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