The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2012
Filed:
Apr. 14, 2005
Gregory Robert Alcott, Liphook, GB;
Mariadriana Creatore, Eindhoven, NL;
Joannes Leonard Linden, Eindhoven, NL;
Mauritius Cornelis Maria Van DE Sanden, Tilburg, NL;
Gregory Robert Alcott, Liphook, GB;
Mariadriana Creatore, Eindhoven, NL;
Joannes Leonard Linden, Eindhoven, NL;
Mauritius Cornelis Maria van de Sanden, Tilburg, NL;
ASM International N.V., Bilthoven, NL;
Abstract
The present invention describes a method for manufacturing a low dielectric constant coating, which coating comprises an inorganic and an organic component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chemical vapor phase and wherein said activated precursors are combined before they are deposited from the chemical vapor phase on the substrate to form the coating, characterized in that said inorganic component comprises porous nanoparticles. The invention also describes a device for the manufacture of a low dielectric constant coating.