The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2012
Filed:
Jan. 03, 2012
Koichi Hashimoto, Ibaraki, JP;
Yoshio Ota, Ibaraki, JP;
Koichi Hashimoto, Ibaraki, JP;
Yoshio Ota, Ibaraki, JP;
Nitto Denko Corporation, Osaka, JP;
Abstract
The present invention is a particle removing member of a substrate processing equipment including a particle removing layer in which a time necessary for a signal intensity of free induction decay measured by a pulse NMR-Solid Echo method to decay to 37% of an initial value at a measurement temperature of 100 degrees centigrade is 1000 μs or less, in particular, a particle removing sheet including the above-constituted particle removing layer on a support, and a conveying member with particle removing function formed by adhering the above-constituted particle removing sheet on the conveying member, and furthermore a method of removing particle of a substrate processing equipment, including conveying the above-constituted conveying member with particle removing function into a substrate processing equipment.