The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
May. 12, 2009
Doron Meshulach, Ramat Gan, IL;
Kobi Kan, Tel-Aviv, IL;
Haim Feldman, Nof-Ayalon, IL;
Ido Dolev, Manof, IL;
Ori Sarfaty, Ramat Hasharon, IL;
Doron Meshulach, Ramat Gan, IL;
Kobi Kan, Tel-Aviv, IL;
Haim Feldman, Nof-Ayalon, IL;
Ido Dolev, Manof, IL;
Ori Sarfaty, Ramat Hasharon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.