The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Jul. 23, 2008
Joseph D. Gillespie, Boston, MA (US);
Sor Kham, Lowell, MA (US);
Robert E. Wayne, Gloucester, MA (US);
Joseph D. Gillespie, Boston, MA (US);
Sor Kham, Lowell, MA (US);
Robert E. Wayne, Gloucester, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A workpiece gripping integrity device and method are provided having a charge-transfer sensing device configured to detect a change in charge associated with a gripper arm assembly based on a grip condition thereof. The charge-transfer sensing device can be configured to detect a change in capacitance between the gripper arm assembly and ground, wherein the change in capacitance is based on a grip condition of the gripper arm assembly associated with a plurality of grippers contacting the workpiece.