The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Feb. 27, 2009
Takahiro Kitano, Koshi, JP;
Koichi Obata, Koshi, JP;
Hiroichi Inada, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Takahiro Kitano, Koshi, JP;
Koichi Obata, Koshi, JP;
Hiroichi Inada, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coating apparatus includes a driving unit configured to rotate a substrate holding member about a vertical axis to spread a coating liquid supplied on a front side central portion of a substrate toward a front side peripheral portion of the substrate by a centrifugal force. The apparatus is provided with a wobble damping mechanism including a gas delivery port and a suction port both disposed to face a back side of the substrate and configured to damp a wobble of the substrate being rotated by delivering a gas from the delivery port and sucking the gas into the suction port.