The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8222064 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 17, 2012

Filed:

Jul. 27, 2011
Applicants:

Limin Lin, Hong Kong, HK;

Xiangfeng Shao, Shenzhen, CN;

Inventors:

Limin Lin, Hong Kong, HK;

Xiangfeng Shao, Shenzhen, CN;

Assignee:

Hong Kong Applied Science and Technology Research Institute Company Limited, Hong Kong Science Park, Shatin, New Territories, Hong Kong, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/46 (2006.01); H01L 21/30 (2006.01); H01L 29/18 (2006.01); H01L 27/15 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
Abstract

A method of fabricating a compound semiconductor vertical LED is provided. A first growth substrate capable of supporting compound semiconductor epitaxial growth thereon is provided. One or more epitaxial layers of compound semiconductor material such as GaN or InGaN is formed on the first growth substrate to create a portion of a vertical light emitting diode. Plural trenches are formed in the compound semiconductor material. Passivating material is deposited in one or more trenches. A hard material is at least partially deposited in the trenches and optionally on portions of the compound semiconductor material. The hard material has a hardness greater than the hardness of the compound semiconductor. A metal layer is deposited over the compound semiconductor material followed by metal planarization. A new host substrate is bonded to the metal layer and the first growth substrate is removed. Dicing is used to form individual LED devices.


Find Patent Forward Citations

Lin, Limin. (2012). Vertical light emitting diode device structure and method of fabricating the same (U.S. Patent No. 8222064). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8222064

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