The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2012

Filed:

Jan. 15, 2010
Applicants:

Mikio Oka, Kanagawa, JP;

Kaoru Koike, Kumamoto, JP;

Kensuke Tsuchiya, Kanagawa, JP;

Hidetoshi Ohnuma, Kanagawa, JP;

Inventors:

Mikio Oka, Kanagawa, JP;

Kaoru Koike, Kumamoto, JP;

Kensuke Tsuchiya, Kanagawa, JP;

Hidetoshi Ohnuma, Kanagawa, JP;

Assignee:

Sony Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/76 (2012.01); G03F 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A pattern correction method includes: a correction step of performing pattern correction on a semiconductor circuit pattern having plural transistors as component elements; an order of priority recognition step of recognizing an order of priority set with respect to the plural transistors prior to the pattern correction at the correction step; and a condition adjustment step of adjusting correction conditions for the pattern correction with reference to the transistor having a high priority recognized at the order of priority recognition step in the pattern correction at the correction step.


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