The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Dec. 21, 2007
Yoram Schwarz, Santa Clara, CA (US);
Yoshiki Ashizawa, Pleasanton, CA (US);
Patrick Ngatchou, Santa Clara, CA (US);
Heng-cheng Pai, San Jose, CA (US);
Yoram Schwarz, Santa Clara, CA (US);
Yoshiki Ashizawa, Pleasanton, CA (US);
Patrick Ngatchou, Santa Clara, CA (US);
Heng-Cheng Pai, San Jose, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
A test management system is provided that performs tests on integrated circuit test structures. A server may be used to distribute a test recipe to multiple test cells. Each test cell may have multiple test instruments and associated instrument drivers. When performing a test, a test type module may run on a given test cell. The test type module may perform tests by using the instrument drivers to control the test instruments available in the test cell. Users may make test option selections using graphical interface screens such as a test recipe setup screen and a platform engine control screen. A user can select test sites for testing based on which process parameters where used to fabricate the test structures associated with the test sites or other criteria.