The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Apr. 08, 2009
Jason B. Tauscher, Sammamish, WA (US);
Matthew Ellis, Austin, TX (US);
Dean R. Brown, Lynnwood, WA (US);
Mark P. Helsel, Seattle, WA (US);
Wyatt O. Davis, Bothell, WA (US);
Yunfei MA, Redmond, WA (US);
Michael E. Sherwood, Seattle, WA (US);
John Wyatt Coy, Redmond, WA (US);
David Malametz, Carnation, WA (US);
Jason B. Tauscher, Sammamish, WA (US);
Matthew Ellis, Austin, TX (US);
Dean R. Brown, Lynnwood, WA (US);
Mark P. Helsel, Seattle, WA (US);
Wyatt O. Davis, Bothell, WA (US);
Yunfei Ma, Redmond, WA (US);
Michael E. Sherwood, Seattle, WA (US);
John Wyatt Coy, Redmond, WA (US);
David Malametz, Carnation, WA (US);
Microvision, Inc., Redmond, WA (US);
Abstract
A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.