The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Apr. 23, 2009
Jong-seok Kim, Hwaseong-Si, KR;
Yong-seop Yoon, Seoul, KR;
Moon-chul Lee, Seongnam-Si, KR;
Yong-won Jeong, Seoul, KR;
Dong-sik Shim, Suwon-Si, KR;
Hyung Choi, Seongnam-Si, KR;
Jong-Seok Kim, Hwaseong-Si, KR;
Yong-Seop Yoon, Seoul, KR;
Moon-Chul Lee, Seongnam-Si, KR;
Yong-Won Jeong, Seoul, KR;
Dong-Sik Shim, Suwon-Si, KR;
Hyung Choi, Seongnam-Si, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
A method of manufacturing an inkjet printhead includes forming a chamber layer having multiple ink chambers on a substrate. A sacrificial layer is formed and is configured to fill a space associated with the ink chambers on the chamber layer. A nozzle layer is formed on the top surfaces of the chamber layer and the sacrificial layer and having multiple nozzles. An etching mask is prepared on the bottom surface of the substrate. The etching mask has at least one linear etching pattern configured to define a portion of the substrate in which an ink feed hole is to be formed. The substrate is etched through the linear etching pattern until the sacrificial layer is exposed and a through hole is formed. The through hole defines the portion of the substrate in which the ink feed hole is to be formed. The sacrificial layer and the portion of the substrate surrounded by the through hole are removed to form the ink feed hole.