The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Jun. 10, 2010
Applicants:
David Abdallah, Bernardsville, NJ (US);
Francis Houlihan, Millington, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Inventors:
David Abdallah, Bernardsville, NJ (US);
Francis Houlihan, Millington, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Assignee:
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/30 (2006.01); G03F 7/11 (2006.01); C08L 63/00 (2006.01); C08L 67/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention discloses novel bottom anti-reflective coating compositions where a coating from the composition has an etch rate that can be regulated by the etch plate temperature.